Skin attachable flexible sensor array for respiratory monitoring
Skin attachable flexible sensor array for respiratory monitoring
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DOI：
10.1016/j.sna.2016.09.020
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发表时间：
2016-10-15
影响因子：
4.6
通讯作者：
Dietzel, Andreas
中科院分区：
文献类型：
--
作者：
Koch, Eugen;Dietzel, Andreas
柔性电子系统近年来越来越受欢迎。它们通常可以弯曲甚至拉伸，同时完全保持其功能，从而开辟了各种新应用的广泛领域。在本文中，一种新型的6 × 6传感器阵列的曲率传感的格式薄柔性聚酰亚胺箔。传感器箔用于早产儿的呼吸监测，方法是将其直接贴在皮肤上，以测量呼吸引起的身体变形。传感器信号将来不仅应用于触发呼吸装置，还应用于提供时间相关体表重建作为诊断工具。单个传感器元件由四个惠斯通电桥配置的金应变片组成。为了抑制传感器对箔拉伸的响应并提高弯曲灵敏度，我们引入了双面传感器设计，在薄箔的两个表面上都有应变计，从而比单面传感器设计的灵敏度高170%。不需要翻转衬底就可以制造厚度小于20 μ m的完整传感器阵列箔。单个传感器元件可以在1 mm的弯曲半径范围内进行可靠的测量
Flexible electronic systems became increasingly popular in recent years. They usually can be bent or even stretched while fully maintaining their functionality opening up a wide field of various new applications. In this paper a novel 6 x 6 sensor array for curvature sensing in the format of a thin flexible polyimide foil is introduced. The sensor foil is to be used for respiratory monitoring of premature infants by directly attaching it to the skin for measuring the body deformations caused by breathing. Sensor signals shall in future be used not only to trigger the respiration device but also to provide time dependent body surface reconstruction as a diagnostic tool. One single sensor element consists of four gold strain gauges in a Wheatstone bridge configuration. For suppressing sensor response to foil stretching and for increasing bending sensitivity we introduced a double-sided sensor design with strain gauges on both surfaces of the thin foil leading to a 170% higher sensitivity than a one-sided sensor design. The complete sensor array foil of less than 20 mu m in thickness can be fabricated without flipping the substrate. Single sensor elements can reliably measure in a bending radius range of 1 mm