Correlation between C37 Parameters and Acid Yields in Chemically Amplified Resists upon Exposure to 75 keV Electron Beam
Correlation between C37 Parameters and Acid Yields in Chemically Amplified Resists upon Exposure to 75 keV Electron Beam
复制标题
化学放大抗蚀剂暴露于 75 keV 电子束后 C37 参数与酸产率之间的相关性
DOI：
10.1143/jjap.48.06fc05
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
and S. Tagawa
中科院分区：
文献类型：
--
作者：
K. Natsuda;T. Kozawa;K. Okamoto;A. Saeki;and S. Tagawa
酸产生剂在暴露于电离辐射如电子束时的分解效率主要由酸产生剂与热化电子的反应性决定。反应性已经使用在溶液中产生的溶剂化电子来估计，因为没有方法直接观察与在抗蚀剂膜中产生的热化电子的反应。然而，从与溶剂化电子的反应估计的反应性不具有足够的准确性来再现产酸剂之间的差异。研究了产酸剂C37参数与产酸率的关系.使用四氢呋喃溶液评价C37参数。C37参数被认为反映了溶质与溶液中产生的预溶剂化电子的反应。有人发现，C37参数与抗蚀剂膜中测得的酸产率相关。
The decomposition efficiency of acid generators upon exposure to ionizing radiation such as an electron beam is mainly determined by the reactivity of acid generators with thermalized electrons. The reactivity has been estimated using solvated electrons generated in solutions because there has been no method to directly observe the reaction with thermalized electrons generated in resist films. However, the reactivity estimated from the reaction with solvated electrons does not have sufficient accuracy to reproduce the difference between acid generators. In this study, we investigated the relationship between the acid yield and C 37 parameter of acid generators. The C 37 parameter was evaluated using tetrahydrofuran solution. The C 37 parameter has been believed to reflect the reaction of solutes with presolvated electrons generated in solutions. It was found that the C 37 parameter correlates with acid yields measured in resist films.