A tactile and airflow motion sensor based on flexible double-layer magnetic cilia.
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia.
复制标题
基于柔性双层磁纤毛的触觉和气流运动传感器
DOI：
10.1038/s41378-022-00478-9
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发表时间：
2023
影响因子：
7.9
通讯作者：
Chen, Jiamin
中科院分区：
文献类型：
--
作者：
Man, Jiandong;Zhang, Junjie;Chen, Guangyuan;Xue, Ning;Chen, Jiamin
受仿生学概念的启发，开发了一种基于柔性双层磁纤毛的触觉和气流运动传感器，在力和气流检测方面都表现出极高的灵敏度。磁性纤毛的上层是混合有磁性颗粒的柔性材料，而下层是纯柔性材料。这种双层结构显著提高了磁性，同时保持纤毛的灵活性。此外，金属管压制（MTP）的方法，提出了克服困难，在制备大的纵横比（超过30：1）纤毛，提供简单，避免使用大规模的MEMS仪器。开发的传感器具有0至60 µN的检测范围，微力分辨率为2.1 µN。它还显示出对气流速度的强大检测能力，灵敏度为1.43 µT/（m/s）。实验表明，该传感器可用于表面粗糙度表征和睡眠呼吸暂停监测。
Inspired by the concept of bionics, a tactile and airflow motion sensor based on flexible double-layer magnetic cilia is developed, showing extremely high sensitivity in both force and airflow detection. The upper layer of the magnetic cilia is a flexible material mixed with magnetic particles, while the lower layer is a pure flexible material. This double-layer structure significantly improves magnetism while maintaining cilia flexibility. In addition, a metal tube pressing (MTP) method is proposed to overcome the difficulties in preparing large aspect ratio (over 30:1) cilia, offering simplicity and avoiding the use of large-scale MEMS instruments. The developed sensor has a detection range between 0 and 60 µN with a resolution of 2.1 µN for micro forces. It also shows great detection ability for airflow velocity with a sensitivity of 1.43 µT/(m/s). Experiments show that the sensor could be applied in surface roughness characterization and sleep apnea monitoring.
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