Room temperature ammonia and humidity sensing using highly ordered nanoporous alumina films
Room temperature ammonia and humidity sensing using highly ordered nanoporous alumina films
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DOI：
10.3390/s20300091
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发表时间：
2002-03-01
期刊：
影响因子：
3.9
通讯作者：
Grimes, CA
中科院分区：
文献类型：
--
作者：
Dickey, EC;Varghese, OK;Grimes, CA
报道了孔径和均匀性对通过阳极氧化工艺在铝厚膜上形成的纳米多孔氧化铝在室温下对氨和湿度的响应的影响。所研究的孔径范围从13纳米到48纳米，孔径标准偏差范围从2.6纳米到7.8纳米。材料对氨和湿度的响应是孔径和工作频率的强函数。在5千赫兹时，平均孔径为13.6纳米、标准偏差为2.6纳米的氧化铝传感器在氨和氩环境之间循环时，其阻抗幅值变化两倍。在5千赫兹时，同一传感器在20%到90%相对湿度范围内，阻抗幅值呈现出良好的10³变化。使用等效电路对5赫兹到13兆赫兹测量的阻抗谱进行建模得到的科尔 - 科尔图，用于解析吸附和离子迁移的影响。
The effect of pore size and uniformity on the response of nanoporous alumina, formed on aluminum thick films through an anodization process, to ammonia and humidity at room temperature is reported. Pore sizes examined range from 13 nm to 48 nm, with pore size standard deviations ranging from 2.6 nm to 7.8 nm. The response of the material to ammonia and humidity is a strong function of pore size and operating frequency. At 5 kHz an alumina sensor with an average pore size of 13.6 nm, standard deviation 2.6 nm, exhibits a factor of two change in impedance magnitude as it is cycled between an ammonia and argon environment. At 5 kHz the same sensor exhibits a well-behaved change in impedance magnitude of 10(3) over 20% to 90% relative humidity. Cole-Cole plots of the 5 Hz to 13 MHz measured impedance spectra, modeled using equivalent circuits, are used to resolve the effects of adsorption and ion migration.