Vertically-curved silicon waveguide fabricated by ion-induced bending method for vertical light coupling

Vertically-curved silicon waveguide fabricated by ion-induced bending method for vertical light coupling
复制标题

离子诱导弯曲法制备垂直光耦合垂直弯曲硅波导

DOI：
10.1109/group4.2013.6644440
复制
发表时间：
2013
期刊：
10th International Conference on Group IV Photonics
影响因子：
--
通讯作者：
Y. Sakakibara
Y. Sakakibara
中科院分区：
--
文献类型：
--
作者：
T. Yoshida;T. Nishi;S. Tajima;R. Takei;M. Suzuki;E. Omoda;M. Nagao;N. Miura;M. Mori;Y. Sakakibara

文献摘要

被引文献

相似文献

采用离子诱导弯曲法制备了与衬底垂直弯曲的硅波导。观察到波导的垂直光发射。
Silicon waveguide curving in the vertical direction from the substrate was fabricated using ion-induced bending method. Vertical light emission from the waveguide was observed.