Near-Net Shaping of Single-Crystal Silicon for Optical Lens by One-Shot Pressing at Temperature Just below Silicon Melting Point and Its Demonstration of Optical Properties
Near-Net Shaping of Single-Crystal Silicon for Optical Lens by One-Shot Pressing at Temperature Just below Silicon Melting Point and Its Demonstration of Optical Properties
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DOI：
10.1143/apex.4.106501
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发表时间：
2011-10-01
影响因子：
2.3
通讯作者：
Shiinoki, Masakazu
中科院分区：
文献类型：
--
作者：
Morishita, Kohei;Nakajima, Kazuo;Shiinoki, Masakazu
硅很脆，即使在很小的负荷下也很容易破裂。硅成型的困难阻碍了太赫兹和红外技术硅透镜的大规模生产取得突破。提出了一种将块状单晶硅单次挤压变形成所需形状的新方法，实现了曲率半径为r7.5 mm的块状单晶硅的近净成形。通过一次再结晶提高了晶体的结晶质量。通过将其封装到一个实际的传感器模块中，证明了该镜头在实际应用中的适用性。(C) 2011 .日本应用物理学会
Silicon is brittle and easily cracks even under a small load. The difficulty in shaping silicon has prevented breakthroughs in the mass production of silicon lenses for terahertz and infrared technology. We developed a novel method of deforming bulk single-crystal silicon into the required shape by one-shot pressing and realized the near-net shaping of silicon into a plano-convex shape with the curvature radius R 7: 5 mm. The crystallographic quality of the obtained lens was improved by primary recrystallization. By packaging it into a practical sensor module, the suitability of the lens for practical application was demonstrated. (C) 2011 The Japan Society of Applied Physics