Application of Clustering Filter for Noise and Outlier Suppression in Optical Measurement of Structured Surfaces
Application of Clustering Filter for Noise and Outlier Suppression in Optical Measurement of Structured Surfaces
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DOI：
10.1109/tim.2020.2967571
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发表时间：
2020-02
影响因子：
5.6
通讯作者：
S. Lou;Dawei Tang;W. Zeng;Tao Zhang;F. Gao;H. Muhamedsalih;X. Jiang;P. Scott
中科院分区：
文献类型：
--
作者：
S. Lou;Dawei Tang;W. Zeng;Tao Zhang;F. Gao;H. Muhamedsalih;X. Jiang;P. Scott
与触觉传感器相比，光学技术可以提供快速，无损的轮廓/面表面测量解决方案。然而，在光学测量中经常观察到高测量噪声、未测点和异常值，特别是对于结构表面。为了减轻它们对表面形貌表征以及微/纳米几何形状检测的不利影响，实现了一种后处理滤波技术，即聚类滤波，其本质上是寻找聚类点聚集中心的迭代过程。由于聚类滤波器的边缘保持能力，对结构表面光学测量中的噪声和异常值抑制特别有用。利用自行研制的色散干涉仪和商用白光干涉仪对5个具有结构特征的表面样品进行了测量，然后对测量的表面数据进行了聚类滤波。噪声和异常值都被抑制，这不仅有利于表面形貌的可视化和表征，而且能够准确评估局部功能几何形状。
In comparison to tactile sensors, optical techniques can provide a fast, nondestructive profile/areal surface measurement solution. Nonetheless, high measurement noise, unmeasured points, and outliers are often observed in optical measurement, particularly for structured surfaces. To alleviate their detrimental impacts on the characterization of surface topography as well as the examination of micro/nanoscale geometries, a post processing filtering technique, i.e., the clustering filter, which is essentially an iterative process to find the aggregation center of a cluster of points, is implemented. The clustering filter is particularly useful for noises and outlier suppression for optical measurement of structured surfaces due to its edge-preserving capability. Five surface samples with structured features are measured by an in-house developed dispersive interferometer and a commercial white light interferometer, thereafter the measured surface data are filtered by the clustering filter. Both noise and outliers are suppressed, which not only facilitates the visualization and characterization of surface topography, but also enables the accurate evaluation of local functional geometries.