High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air
High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air
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DOI：
10.1088/0960-1317/16/5/019
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发表时间：
2006-05-01
影响因子：
2.3
通讯作者：
Yu, Haitao
中科院分区：
文献类型：
--
作者：
Jin, Dazhong;Li, Xinxin;Yu, Haitao
根据对用于生物/化学分子检测的超灵敏质量传感器的需求，开发了用于在空气环境中检测的谐振悬臂梁传感器。压阻电桥和金属线圈都集成在悬臂梁中，分别用于信号传感和洛伦兹力共振激励。与传统的第一弯曲模式谐振相比，第二模式谐振的测量结果表明，由于更高的品质因数，质量传感分辨率从0.17 pg提高到0.06 pg。为了进一步提高分辨率，提出并开发了一种针对第二谐振模式的优化电磁激励方法。优化的方法提供了一个两点激励，匹配的悬臂梁偏转的第二模式的形状函数，并激发第二模式更有效。与传统激励方法相比，优化激励悬臂梁将品质因数从307提高到857。基于最佳激励的第二模式谐振传感器的实验结果，实现了29 × 10（-15）g的空气质量传感分辨率。开发的第二模式谐振悬臂梁传感器与压阻式传感元件集成在芯片上是有前途的高性能便携式生物/化学传感应用。
According to the demand for an ultrasensitive mass sensor for bio/chemical molecular detection, resonant cantilever sensors are developed for detection in an air environment. Both a piezoresistive bridge and a metal coil are integrated in the cantilever for signal sensing and Lorentz-force resonance excitation, respectively. Compared with conventional first flexure mode resonance, measurement results for the second mode resonance show an improved mass-sensing resolution from 0.17 pg to 0.06 pg due to the higher quality factor. For further improving the resolution, an optimized electromagnetic excitation method specifically for the second resonant mode is proposed and developed. The optimized method provides a two-point excitation that matches the second mode shape function of the cantilever deflection and excites the second mode more efficiently. Compared to a cantilever with a conventional excitation method, the optimally excited cantilever improves the quality factor from 307 to 857. Based on the experimental results for the optimally excited second mode resonant sensor, 29 x 10(-15) g resolution for in-air mass sensing is achieved. The developed second mode resonant cantilever sensor with piezoresistive sensing element integrated on-chip is promising for use in high-performance portable biological/chemical sensing applications.