Nanostructuring Ferroelectrics via Focused Ion Beam Methodologies
Nanostructuring Ferroelectrics via Focused Ion Beam Methodologies
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DOI：
10.1002/adfm.201603812
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发表时间：
2016-12-13
影响因子：
19
通讯作者：
Nagarajan, Valanoor
中科院分区：
文献类型：
--
作者：
Burns, Stuart R.;Gregg, J. Marty;Nagarajan, Valanoor
随着我们达到摩尔定律和硅基电子器件的物理极限，人们会定期提出存储器和传感器设备的替代方案。纳米级铁电材料的特性是开发此类有趣材料的设备应用的关键，并且纳米结构近年来已被广泛采用。聚焦离子束 (FIB) 显微镜是实现这一目标的最重要技术之一。当与近端扫描力显微镜工具提供的成像和纳米级操纵结合使用时，FIB 驱动的纳米级表征已经证明了在寻找创新和新颖铁电现象时其他制造技术不可能实现的力量和能力。与此同时，这个过程也并非没有陷阱。它非常耗时，而且并不总是能保证成功，因此常常成为进展中的祸根。这篇平衡的评论探讨了 FIB 和铁电体之间关系的简史、它所揭示的令人着迷的特性、与 FIB 相关的挑战（这些挑战导致了替代纳米结构技术的出现），以及最后应该使用这种令人兴奋的技术探索的新想法。
As we reach the physical limit of Moore's law and silicon based electronics, alternative schemes for memory and sensor devices are being proposed on a regular basis. The properties of ferroelectric materials on the nanoscale are key to developing device applications of this intriguing material class, and nanostructuring has been readily pursued in recent times. Focused ion beam (FIB) microscopy is one of the most significant techniques for achieving this. When applied in tandem with the imaging and nanoscale manipulation afforded by proximal scanning force microscopy tools, FIB-driven nanoscale characterization has demonstrated the power and ability which simply may not be possible by other fabrication techniques in the search for innovative and novel ferroic phenomena. At the same time the process is not without pitfalls; it is time-consuming and success is not always guaranteed thus often being the bane in progress. This balanced review explores a brief history of the relationship between the FIB and ferroelectrics, the fascinating properties it has unveiled, the challenges associated with FIB that have led to alternative nanostructuring techniques and finally new ideas that should be explored using this exciting technique.