Flexible Film Metamaterial for a thin THz-Wave Phase Shifter
Flexible Film Metamaterial for a thin THz-Wave Phase Shifter
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DOI：
10.1364/jsap.2017.7p_a409_11
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发表时间：
2017-07
期刊：
影响因子：
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通讯作者：
Zhengli Han;Y. Tokizane;K. Nawata;T. Notake;Y. Takida;H. Minamide
中科院分区：
文献类型：
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作者：
Zhengli Han;Y. Tokizane;K. Nawata;T. Notake;Y. Takida;H. Minamide
在集成太赫兹光谱学和成像系统中，薄太赫兹（THz）波光学元件是必不可少的[1,2]。一般来说，对波的传播控制不仅是振幅传输，而且相位控制也很重要。本文报道了一种用柔性薄膜材料制成的高透射率的薄太赫兹波移相器。器件设计分为两部分，一部分作为1/4 π的移相器，另一部分作为移相器的参考。超材料单元结构采用双层分裂环谐振器（srr）使两部分的相对相位差均达到1/4 π，同时保持相同的透射系数0.82。由于SRR结构的四重对称，移相器还具有偏振无关的特性。该器件采用光刻和湿法蚀刻技术，采用柔性聚合物薄膜作为衬底。
Thin terahertz (THz) -wave optical components are essentially required in integrated THz-wave spectroscopy and imaging systems [1,2]. Generally, not only transmission in amplitude but also phase control are significant on manipulations of wave propagation. In this paper, we report a thin THz-wave phase shifter demonstrated by flexible film metamaterial with high transmission. The device design has two parts, where one works as a phase shifter of 1/4 π and the other works as the reference for the phase shifter. Metamaterial unit structure employs double-layer split ring resonators (SRRs) both for the two parts to obtain the relative phase difference of 1/4 π while keeping the same transmission coefficient of 0.82. The phase shifter also holds the property of polarization independence due to the four-fold symmetry on the SRR structure. The device is developed by photolithography and wet etching techniques with flexible polymer film used as the substrate.