Iop Publishing Journal of Micromechanics and Microengineering Large Displacement Vertical Translational Actuator Based on Piezoelectric Thin Films
Iop Publishing Journal of Micromechanics and Microengineering Large Displacement Vertical Translational Actuator Based on Piezoelectric Thin Films
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通讯作者：
Z. Qiu;J. Pulskamp;Xianke Lin;Choong-Ho Rhee;Thomas D. Wang;R. Polcawich;K. Oldham
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作者：
Z. Qiu;J. Pulskamp;Xianke Lin;Choong-Ho Rhee;Thomas D. Wang;R. Polcawich;K. Oldham
提出了一种新型的基于薄膜压电驱动的垂直平移微致动器，该微致动器利用一组四个复合的上下弯曲单形器来产生运动平台或舞台的平移运动。驱动材料是化学溶液沉积的锆钛酸铅（PZT）薄膜。原型设计显示静态位移高达120 μm，典型的是80-90 μm的位移，使用四个920 μm长70 μm的腿。当压电系数对电压的依赖关系已知时，给出了准确描述原型阶段静态和动态运行非线性行为的解析模型。在200赫兹的频率下观察到系统的共振。在低电压和低功率水平下的大位移和高带宽执行器应该使它们适用于各种光学应用，包括内窥镜显微镜。
A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead–zirconate–titanate (PZT) thin film. Prototype designs have shown as much as 120 μm of static displacement, with 80–90 μm displacements being typical, using four 920 μm long by 70 μm legs. Analytical models are presented that accurately describe nonlinear behavior in both static and dynamic operation of prototype stages when the dependence of piezoelectric coefficients on voltage is known. Resonance of the system is observed at a frequency of 200 Hz. The large displacement and high bandwidth of the actuators at low-voltage and low-power levels should make them useful to a variety of optical applications, including endoscopic microscopy.