Ultrananocrystalline diamond tip integrated onto a heated atomic force microscope cantilever.
Ultrananocrystalline diamond tip integrated onto a heated atomic force microscope cantilever.
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超纳米晶金刚石尖端集成到加热原子力显微镜悬臂上。
DOI：
10.1088/0957-4484/23/49/495302
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发表时间：
2012
期刊：
影响因子：
3.5
通讯作者：
King,WilliamP
中科院分区：
文献类型：
--
作者：
Kim,HoeJoon;Moldovan,Nicolaie;Felts,JonathanR;Somnath,Suhas;Dai,Zhenting;Jacobs,TevisDB;Carpick,RobertW;Carlisle,JohnA;King,WilliamP
我们报道了一种集成在加热原子力显微镜(AFM)悬臂上的耐磨超纳米晶(UNCD)金刚石尖端和集成在加热AFM悬臂阵列中的UNCD尖端。UNCD尖端是批量制造的，尖端半径约为10 nm，高度高达7μm。固态加热器的温度可达到600C以上，也是一种电阻式温度传感器。在单晶硅栅上以200nN的力和10μm S−1的速度扫描1.2m，获得了耐磨的针尖。在相同的条件下，硅尖完全钝化。我们演示了这些加热悬臂在接触模式和间歇接触模式下的热成像的使用，垂直成像分辨率为1.9 nm。随着尖端写出数百个聚乙烯纳米结构，它在纳米光刻技术中的潜在应用也被展示出来。
We report a wear-resistant ultrananocrystalline (UNCD) diamond tip integrated onto a heated atomic force microscope (AFM) cantilever and UNCD tips integrated into arrays of heated AFM cantilevers. The UNCD tips are batch-fabricated and have apex radii of approximately 10 nm and heights up to 7 μm. The solid-state heater can reach temperatures above 600 C and is also a resistive temperature sensor. The tips were shown to be wear resistant throughout 1.2 m of scanning on a single-crystal silicon grating at a force of 200 nN and a speed of 10 μm s− 1. Under the same conditions, a silicon tip was completely blunted. We demonstrate the use of these heated cantilevers for thermal imaging in both contact mode and intermittent contact mode, with a vertical imaging resolution of 1.9 nm. The potential application to nanolithography was also demonstrated, as the tip wrote hundreds of polyethylene nanostructures.