Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection
Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection
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DOI：
10.1109/jmems.2006.883568
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发表时间：
2006-12-01
影响因子：
2.7
通讯作者：
Manalis, Scott R.
中科院分区：
文献类型：
--
作者：
Burg, Thomas P.;Mirza, Amir R.;Manalis, Scott R.
在实验生物学中，非常需要研究生物分子之间的相互作用和分析大量蛋白质表达水平的工具。本文描述了一种用于检测微流体形式的生物分子的谐振质量传感器的制造、封装和测试。该传感器采用悬浮微通道作为谐振元件，从而避免了阻尼和粘性阻力的问题，这些问题通常会降低液体中谐振传感器的灵敏度。我们的设备与振动管密度计的不同之处在于通道非常薄，这使得能够检测与通道壁结合的分子;这通过固定化受体的分子识别提供了特异性的途径。该制造是基于一个牺牲的多晶硅工艺与低应力低压化学气相沉积（LPCVD）氮化硅作为结构材料，和谐振器是真空封装的晶圆级使用玻璃料键合。封装的谐振器具有0.8 ppm/（ng（.）cm（2））和高达700的机械品质因数。据我们所知，该品质因数是迄今为止报道的具有液体中可比表面质量灵敏度的谐振传感器中最高的。
There is a great need in experimental biology for tools to study interactions between biological molecules and to profile expression levels of large numbers of proteins. This paper describes the fabrication, packaging and testing of a resonant mass sensor for the detection of biomolecules in a microfluidic format. The transducer employs a suspended microchannel as the resonating element, thereby avoiding the problems of damping and viscous drag that normally degrade the sensitivity of resonant sensors in liquid. Our device differs from a vibrating tube densitometer in that the channel is very thin, which enables the detection of molecules that bind to the channel walls; this provides a path to specificity via molecular recognition by immobilized receptors. The fabrication is based on a sacrificial polysilicon process with low-stress low-pressure chemical-vapor deposited (LPCVD) silicon nitride as the structural material, and the resonator is vacuum packaged on the wafer scale using glass frit bonding. Packaged resonators exhibit a sensitivity of 0.8 ppm/(ng(.)cm(2)) and a mechanical quality factor of up to 700. To the best of our knowledge, this quality factor is among the highest so far reported for resonant sensors with comparable surface mass sensitivity in liquid.