Optical vortex metrology for nanometric speckle displacement measurement
Optical vortex metrology for nanometric speckle displacement measurement
复制标题
DOI：
10.1364/opex.14.000120
复制
发表时间：
2006-01-09
期刊：
影响因子：
3.8
通讯作者：
Hanson, SG
中科院分区：
文献类型：
--
作者：
Wang, W;Yokozeki, T;Hanson, SG
作为一种替代的相关性为基础的技术广泛用于传统的散斑计量，我们提出了一种新的技术，利用相位奇点的复杂的散斑图案的分析信号作为指标的局部散斑位移。通过涡旋滤波散斑图产生复解析信号。实验结果表明，所提出的光学涡旋计量与纳米级分辨率的有效性和性能。(c)2006年美国光学学会。
As an alternative to correlation-based techniques widely used in conventional speckle metrology, we propose a new technique that makes use of phase singularities in the complex analytic signal of a speckle pattern as indicators of local speckle displacements. The complex analytic signal is generated by vortex filtering the speckle pattern. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology with nano-scale resolution. (c) 2006 Optical Society of America.