Entwicklung von Mikroaktoren aus Formgedächtnislegierungen
Entwicklung von Mikroaktoren aus Formgedächtnislegierungen
复制标题
形成法律中的微观结构
DOI：
--
复制
发表时间：
2002
期刊：
影响因子：
--
通讯作者：
M. Kohl
中科院分区：
文献类型：
--
作者：
M. Kohl;M. Kohl
形状记忆合金（SMA）具有形状回复的特性，这与高能量密度的产生有关。如今，它们已经在一些非常成功的应用中使用。在过去的10年里，SMA器件也进入了微系统技术领域。本报告概述了目前的最先进的。为SMA微阀和SMA线性执行器的例子，微执行器的发展从想法到原型的全面广度。目前SMA微致动器的研究和开发活动的范围从材料研究的纯科学主题到技术问题，例如微加工，集成和接触。开发的其他关键方面是用于处理复杂SMA致动器几何形状的三维模型和耦合模拟例程，以便考虑多功能特性。对于致动器的设计，机械和热优化标准的介绍，其系统的实施允许最佳使用的形状记忆效应。一些提出的原型已经是有竞争力的组件。其中一个例子是由20 μm厚的SMA箔致动器驱动的常开SMA微型阀，这是最小的微型阀之一，并且仍然能够控制与其他阀概念相当的压力和流量。由于它们的模块化设计，它们可以以灵活的方式与其他微流体组件组合，以实现流体微系统。另一个例子是SMA微型夹持器，SMA线性致动器的进一步发展，目前在夹持力和行程方面优于其他尺寸相当的微型夹持器。
Shape memory alloys (SMAs) have the fascinating property of shape recovery, which is associated with the generation of high energy densities. Nowadays, they are already used in several very successful applications. Within the last 10 years, SMA devices have entered also the field of microsystems technology. The present report gives an overview on the current state-of-the-art. For the examples of SMA microvalves and SMA linear actuators, the microactuator development is described from the idea to the prototype in comprehensive breadth. The breadth of research and development activities on SMA microactuators presently ranges from pure scientific topics of materials research to technological problems, e.g. of micromachining, integration and contacting. Further key aspects of development are threedimensional models for the handling of complex SMA actuator geometries and coupled simulation routines in order to take multifunctional properties into account. For actuator design, mechanical and thermal optimization criteria are introduced, whose systematic implementation allows an optimum use of the shape memory effect. Some of the presented prototypes are already competitive components. One example are normally-open SMA microvalves driven by SMA foil actuators of 20 μm thickness, which are counted among the smallest microvalves and which still are able to control pressures and flows comparable to other valve concepts. Due to their modular design they can be combined with other microfluidic components in a flexible way for realization of fluidic microsystems. Another example are SMA microgrippers, a further development of SMA linear actuators, which presently outperform other microgrippers of comparable size with respect to gripping force and stroke.