Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window
Diamond-like carbon thin films grown by large-area surface-wave mode microwave plasma CVD: Effects of stage distance to microwave window
复制标题
大面积表面波模式微波等离子体 CVD 生长的类金刚石碳薄膜：工作台距离微波窗口的影响
DOI：
10.1016/j.diamond.2005.12.012
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发表时间：
2006
影响因子：
4.1
通讯作者：
M. Umeno
中科院分区：
文献类型：
--
作者：
S. Adhikari;A. Omer;S. Adhikary;M. Rusop;H. Uchida;M. Umeno
