SPR phase detection for measuring the thickness of thin metal films.
SPR phase detection for measuring the thickness of thin metal films.
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DOI：
10.1364/oe.22.007574
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发表时间：
2014-04
期刊：
影响因子：
3.8
通讯作者：
Chao Liu;Qinggang Liu;Xiaotang Hu
中科院分区：
文献类型：
--
作者：
Chao Liu;Qinggang Liu;Xiaotang Hu
提出了一种利用表面等离子体共振相位检测技术测量金属薄膜厚度的新方法。模拟结果显示了金属膜厚度与反射光横磁（TM）和横电（TE）偏振相位之间的关系。通过记录实验中包含相位差信息的干涉图样，计算出厚度值。理论分析和实验结果均表明，该方法是可行和可靠的。因此，可以用相位检测法直接测定SPR棱镜耦合器中100nm以内金属薄膜的厚度，并具有纳米级的分辨率。
In this paper, a novel method to determine the thickness of thin metal film is put forward which uses Surface Plasmon Resonance (SPR) phase detection method. The relations between the metal film thickness and the phases of the transverse magnetic (TM) and transverse electric (TE) polarization of the reflected light are shown in the simulation results. By recording the interference patterns which contain the information of the phase differences in the experiments, the values of thickness are calculated. Both of the theoretical analysis and experimental results indicate that the approach presented is feasible and reliable. Thus, it is possible to use the method of phase detection to determine the thickness of thin metal films within 100nm in SPR prism couplers directly with nanometer resolution.