Characterization of Ti : LiNbO3 waveguides by micro-raman and luminescence spectroscopy
Characterization of Ti : LiNbO3 waveguides by micro-raman and luminescence spectroscopy
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通过显微拉曼和发光光谱表征 Ti:LiNbO3 波导
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
P. Bourson
中科院分区：
文献类型：
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作者：
Y. Zhang;L. Guilbert;P. Bourson
利用拉曼光谱和荧光光谱对钛扩散铌酸锂波导进行了无损表征，其分辨率达到了经典的共焦显微镜（0.5×0.5×3 μm）。表面附近的拉曼线的加宽允许人们测量锂向外扩散和钛向内扩散的深度。极化子发光的对比度使得有可能在扩散过程之后对波导进行常规控制。垂直扫描给出了晶片表面附近的化学还原层的厚度，而穿过波导的水平扫描揭示了钛条对表面还原的屏蔽效应。
Raman and luminescence spectroscopies are used for non destructive characterization of titanium-diffused LiNbO3 waveguides at the classical resolution of confocal microscopy (0.5×0.5×3 μm). The broadening of Raman lines near the surface permits one to measure the depths of lithium out-diffusion and titanium in-diffusion. The contrast of polaron luminescence makes it possible to control routinely the waveguides just after the diffusion process. Vertical scans give the thickness of the chemically-reduced layer near the surface of the wafer, whereas horizontal scans across the waveguides reveal screening effects by the titanium stripes against surface reduction.