All-Solid-State Electro-Chemo-Mechanical Actuator Operating at Room Temperature
All-Solid-State Electro-Chemo-Mechanical Actuator Operating at Room Temperature
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DOI：
10.1002/adfm.202006712
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发表时间：
2020-10-07
影响因子：
19
通讯作者：
Lubomirsky, Igor
中科院分区：
文献类型：
--
作者：
Makagon, Evgeniy;Wachtel, Ellen;Lubomirsky, Igor
固体中由电化学驱动的成分变化引起的尺寸变化称为电化学-化学-机械(ECM)耦合。这种效应导致锂离子电池和固体氧化物燃料电池的机械不稳定。然而，它可以产生相当大的力和变形，这使得它对机械驱动很有吸引力。这里展示了直径为2 mm的薄膜形式的硅兼容ECM致动器。驱动是由1.5微米厚的Ce(0.8)Gd(0.2)O(1.9)固体电解质隔开的两个0.1微米厚的钛氧化物\Ce(0.8)Gd(0.2)O(1.9)纳米复合层之间的氧离子转移引起的。复合材料中产生应力的化学反应是电化学氧化/还原。在环境条件下，施加5V直流电压可在几秒钟内产生驱动器响应，产生几个微米的垂直位移，计算应力接近3.5 Mpa。膜驱动器在去电压后保持其最终的机械状态超过1小时。这些特性非常适合硅集成微电子机械系统中室温应用的ECM致动器。
Dimensional change in a solid due to electrochemically driven compositional change is termed electro-chemo-mechanical (ECM) coupling. This effect causes mechanical instability in Li-ion batteries and solid oxide fuel cells. Nevertheless, it can generate considerable force and deformation, making it attractive for mechanical actuation. Here a Si-compatible ECM actuator in the form of a 2 mm diameter membrane is demonstrated. Actuation results from oxygen ion transfer between two 0.1 mu m thick Ti oxide\Ce(0.8)Gd(0.2)O(1.9)nanocomposite layers separated by a 1.5 mu m thick Ce(0.8)Gd(0.2)O(1.9)solid electrolyte. The chemical reaction responsible for stress generation is electrochemical oxidation/reduction in the composites. Under ambient conditions, application of 5 V DC produces actuator response within seconds, generating vertical displacement of several mu m with calculated stress approximate to 3.5 MPa. The membrane actuator preserves its final mechanical state for more than 1 h following voltage removal. These characteristics uniquely suit ECM actuators for room temperature applications in Si-integrated microelectromechanical systems.