Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge
Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge
复制标题
使用微波放电产生毫托范围内的大直径均匀等离子体
DOI：
10.1143/jjap.38.4309
复制
发表时间：
1999
影响因子：
1.5
通讯作者：
T. Morimoto
中科院分区：
文献类型：
--
作者：
Y. Yasaka;D. Nozaki;K. Koga;M. Ando;Tetsuya Yamamoto;N. Goto;N. Ishii;T. Morimoto
在mTorr范围内的压力下，通过微波放电而不使用磁场获得了大直径均匀等离子体。2.45 GHz的微波场由位于放电室玻璃窗上方近距离处的多槽平面天线发射。在较宽的微波功率和气体压力范围内，在直径30 cm范围内产生的离子饱和电流均匀性为±3-4%。放电可以在低至0.5 mTorr的压力下启动。通过测量系统中的微波场传播，研究了超密等离子体的高效产生。
A large-diameter uniform plasma is obtained by microwave discharge without the use of magnetic fields at pressures in the mTorr range. Microwave fields at 2.45 GHz are radiated from a multislotted planar antenna located a short distance above the glass window of a discharge chamber. Overdense plasmas are produced with ± 3–4% uniformity of ion saturation current over 30 cm diameter for wide ranges of microwave power and gas pressure. The discharge can be started up at pressures as low as 0.5 mTorr. The efficient production of overdense plasmas is investigated by measuring microwave field propagation in the system.