Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method
Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method
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DOI：
10.1557/proc-784-c11.31
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发表时间：
2004-06
影响因子：
2.7
通讯作者：
T. Morita;Y. Wagatsuma;H. Morioka;H. Funakubo;N. Setter;Yasuo Cho
中科院分区：
文献类型：
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作者：
T. Morita;Y. Wagatsuma;H. Morioka;H. Funakubo;N. Setter;Yasuo Cho
水热法沉积薄膜具有沉积温度低、纯度高、沉积在三维结构上、厚度大等优点。虽然已经报道了一种外延生长的锆钛酸铅(PZT)薄膜，但由于薄膜的剥离形态，铁电测量还没有进行。本文研究了水热法制备PZT外延薄膜的工艺改进。通过调整底物在溶液中的悬浮位置，成功地获得了光滑的表面形貌。作为底电极，在SrTiO3单晶上沉积了2 0 0 nm的SrRuO3薄膜，在SrRuO3衬底上沉积了PZT薄膜。PZT在SrRuO3/SrTiO3(0 0 1)上的剩余极化为17.1μC/cm2，矫直电场为36 kV/cm，在SrRuO3/SrTiO3(111)上的剩余极化为32.7μC/cm2，矫直电场为5 9kV/cm。在这个阶段，产生大的压痕电场的原因尚不清楚，尽管它与自对准极化方向有关，但每个膜的压痕电场分别为91kV/cm和40kV/cm。这种自对准极化方向通过扫描非线性介电显微镜得到证实，并被认为与沉积机制有关。
Deposition of thin films via hydrothermal method has various advantages: low deposition temperature, high purity, deposition on a three-dimensional structure,and a large thickness. Although an epitaxial lead zirconate titanate (PZT) thin-film deposition has been reported, the ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The current paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, a 200-nm SrRuO_3 thin film was deposited on SrTiO_3 single crystals, and the PZT thin film was deposited on SrRuO_3. The remanent polarization 2 Pr and coercive electric field for PZT on SrRuO_3/SrTiO_3 (001) were 17.1 μC/cm^2 and 36 kV/cm, respectively, and those of PZT on SrRuO_3/SrTiO_3 (111) were 32.7 μC/cm^2 and 59 kV/cm, respectively. The reason for large imprint electrical field, 91 kV/cm and 40 kV/cm for each film, was unclear at this stage, although it is associated with self–alignment poling direction. This self–alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.