Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe: "Effects of ion irradiation on plasma anisotropic CVD"Proceedings of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. (i
Kosuke Takenaka, Manabu Takeshita, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe: "Effects of ion irradiation on plasma anisotropic CVD"Proceedings of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. (i
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Kosuke Takenaka、Manabu Takeshita、Kazunori Koga、Masaharu Shiratani、Yukio Watanabe:“离子辐照对等离子体各向异性 CVD 的影响”先进电磁能源加工新型材料国际研讨会论文集。
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