Dislocation filtering: why it works, when it doesn’t
Dislocation filtering: why it works, when it doesn’t
复制标题
位错过滤：为什么有效，何时无效
DOI：
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发表时间：
1990
期刊：
影响因子：
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通讯作者：
B. Dodson
中科院分区：
文献类型：
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作者：
B. Dodson
位错过滤，或使用超晶格结构去除穿透位错，对于必须使用缓冲层或低质量衬底材料的高质量半导体异质结构的制造具有很大的潜力。然而，一个准确的和预测的过滤现象的模型，尚未确定，导致不稳定的结果时，试图设计位错过滤器。传统上，滤波一直被视为各种准平衡模型，这往往是缺乏时，应用到真实的系统。这些机制进行检查，以期了解他们在真实的世界的局限性。提出了一种基于晶体生长过程中遇到的非平衡组态的亚稳态冻结的位错过滤新机制。这种非平衡机制克服了传统过滤模型的许多局限性。
Dislocation filtering, or the removal of threading dislocations using a superlattice structure, has much potential for fabrication of high-quality semiconductor heterostructures for which buffer layers or low-quality substrate material must be used. An accurate and predictive model for the filtering phenomenon, however, has not yet been identified, leading to erratic results when attempts to design dislocation filters are made. Filtering has traditionally been treated in terms of various quasi-equilibrium models, which are often found to be lacking when applied to real systems. These mechanisms are examined with a view toward understanding their limitations in the real world. A fundamentally new mechanism for dislocation filtering, based on metastable freezing of non-equilibrium configurations encountered during crystal growth, is proposed. This non-equilibrium mechanism overcomes many of the limitations presented by the conventional filtering models.