Three-dimensional adiabatic quantum-flux-parametron fabricated using a double-active-layered niobium process

Three-dimensional adiabatic quantum-flux-parametron fabricated using a double-active-layered niobium process
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DOI:
10.1088/1361-6668/aa6ef4
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发表时间:
2017-07-01
影响因子:
3.6
通讯作者:
Yoshikawa, Nobuyuki
Yoshikawa, Nobuyuki
中科院分区:
物理与天体物理1区
文献类型:
--
作者:
Ando, Takumi;Nagasawa, Shuichi;Yoshikawa, Nobuyuki

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绝热量子流参量管(AQFP)是一种超低功耗超导逻辑。在这项研究中,我们提出并设计了三维(3D)AQFP,以实现高电路密度和高效的互连。在3D-AQFP中,不同的AQFP逻辑电路可以设计在接地平面(GP)之上和之下。3D-AQFP电路采用AIST 10 kA cm(-2)Nb双栅工艺制造,其中两个有源层由单个GP分隔。其次是基本的逻辑单元测试,我们展示了一个3D异或门的实验演示,其中的积木单元垂直堆叠,以节省电路面积和布线长度。测量结果表明,3D-XOR门的合理激励电流裕度大于+/-16%。
Adiabatic quantum-flux-parametron (AQFP) is an ultra-low-power superconductor logic. In this study, we proposed and designed three-dimensional (3D) AQFP to achieve high circuit density and efficient interconnections. In 3D-AQFP, different AQFP logic circuits can be designed both over and under a ground plane (GP). The 3D-AQFP circuits are fabricated using the AIST 10 kA cm(-2) Nb double gate process, in which two active layers are separated by a single GP. Followed by basic logic cell tests, we show an experimental demonstration of a 3D-XOR gate, the building block cells of which are vertically stacked to save circuit area and wiring length. The measurement results showed reasonable excitation current margins of more than +/- 16% for the 3D-XOR gate.