Studying of silane thermal decomposition mechanism
Studying of silane thermal decomposition mechanism
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硅烷热分解机理研究
DOI：
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发表时间：
1998
期刊：
影响因子：
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通讯作者：
V. N. Panfilov
中科院分区：
文献类型：
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作者：
A. Onischuk;V. Strunin;M. A. Ushakova;V. N. Panfilov
在流动反应器中研究了硅烷的热分解机理。比较了硅烷消耗和二硅烷生成与固相产物(气溶胶颗粒)的浓度、固相产物总氢含量、固相产物中含氢聚合基(SiH2)n等参数的时间依赖性，并用质谱仪分析了硅烷损失和气相产物的形成。用红外光谱和析氢法分析了固体产物中的氢含量。基于一个简单的动力学模型，我们定性地解释了硅烷转化率和二硅烷生成、分解过程的有效活化能以及固相产物中多氢化基的数量与反应时间和初始硅烷浓度的实验依赖关系。©1998 John Wiley&Sons，Inc.Int J Chem Keeet 30：99-110,1998。
The mechanism of silane thermal decomposition is investigated in a flow reactor. The time dependencies of silane consumption and disilane formation were compared with those parameters of solid product (aerosol particles) such as concentration, total hydrogen content in solid product, and fraction of hydrogen contained in solid product as polyhydride groups (SiH2)n. Silane loss and gaseous product formation were analyzed using a mass spectrometer. The hydrogen content in solid product was analyzed by the methods of IR-spectroscopy and hydrogen evolution. Based on a simple kinetic scheme we qualitatively explained the experimental dependencies of silane conversion and disilane formation, the effective activation energy of the decomposition process, and the amount of polyhydride groups in the solid product on reaction time and initial silane concentration. © 1998 John Wiley & Sons, Inc. Int J Chem Kinet 30: 99–110, 1998.