Ceramic meso hot-plates for gas sensors
Ceramic meso hot-plates for gas sensors
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DOI：
10.1016/j.snb.2004.04.040
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发表时间：
2004-09-29
影响因子：
8.4
通讯作者：
Moos, R
中科院分区：
文献类型：
--
作者：
Rettig, F;Moos, R
提出了一种新型气敏元件，它结合了微机械硅气敏元件和陶瓷气敏元件的优点。低温共烧陶瓷(LTCC)技术是制造高频应用的高密度可积电路的尖端技术，用于制造气体传感器。传感器设备的形状类似于已知的热板低功率微机械硅气传感器。与传统的陶瓷气体传感器相比，低导热系数(3W/mK)导致了低功耗(330℃下480 mW)。与昂贵的硅技术相比，廉价的制造技术是小系列产品的显著优势。这一贡献展示了LTCC热板式气体传感器的第一个结果，包括此类设备的设计、制造、测试和模拟。测量了重要的热物性，如功耗和温度分布，并与有限元模拟进行了比较。模拟结果被用于改善热板上的温度分布。首先，使用丙烷敏感的Cr2O3层进行的测量显示了使用LTCC中间热板作为气体传感器的概念的主要可操作性。(C)2004爱思唯尔B.V.保留所有权利。
A new type of gas sensor is presented that combines the advantages of micro machined silicon gas sensors and ceramic gas sensors. Low temperature co-fired ceramics (LTCC)-technology, which is the cutting edge for manufacturing high density integrable circuits for high frequency applications, is used to manufacture gas sensors. The sensor devices are shaped like already known hot-plate low-power micro machined silicon gas sensors. Compared to classical ceramic gas sensors the low thermal conductivity (3 W/mK) leads to a low power consumption (480 mW at 330degreesC). The inexpensive manufacturing technology is a remarkable advantage for small series compared to the expensive silicon technology. This contribution presents first results for LTCC hot-plate gas sensors that include design, manufacturing, tests and simulation of such devices. Important thermal properties like power consumption and temperature distribution are measured and compared to FEM-simulations. The results of the simulations are used to improve the temperature distribution on the hot-plate. First measurements using a propane sensitive Cr2O3 layer show the principal operativeness of the concept using LTCC meso hot-plates for gas sensors. (C) 2004 Elsevier B.V. All rights reserved.