M.Ishikawa: "DEPOSITION OF SILICON OXIDE FILMS ON POLYMER USING %)Hz PLASMA CVD" Proc.of the 10th symposium on plasma processing. Vol.10. 467-470 (1993)
M.Ishikawa: "DEPOSITION OF SILICON OXIDE FILMS ON POLYMER USING %)Hz PLASMA CVD" Proc.of the 10th symposium on plasma processing. Vol.10. 467-470 (1993)
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石川先生:%20"DEPOSITION%20OF%20SILICON%20OXIDE%20FILMS%20ON%20POLYMER%20USING%20%)Hz%20PLASMA%20CVD"%20Proc.of%20the%2010th%20symposium%20on%20plasma%20processing.%
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