Machining of micro-holes on a thin glass plate by femtosecond laser pulses
Machining of micro-holes on a thin glass plate by femtosecond laser pulses
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利用飞秒激光脉冲在薄玻璃板上加工微孔
DOI：
10.2351/1.5059822
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
Yoshiro Ito
中科院分区：
文献类型：
--
作者：
Y. Kurosaki;N. Kuriyama;Yoshiro Ito
在空气和氦气环境中，飞秒激光脉冲可以在薄玻璃板上钻出几十微米的孔。使用以 1 kHz 传输 775 nm、150 fs 脉冲的飞秒激光器（Clark-MXR，CPA 2001）在约 150 微米厚的钠钙玻璃板上加工孔。激光脉冲通过平凸透镜在空气或氦气流下聚焦到玻璃板上。照射激光脉冲的数量由电动快门控制。通过激光显微镜和扫描电镜观察钻孔的形状。孔为圆锥形，除了在孔的出口端出现贝壳状裂纹外，孔的侧面无裂纹。前表面的孔径小于表面的激光光斑尺寸，并且在相同的投影条件下随着激光脉冲能量的增加而增大。随着脉冲数的增加，孔的发展显示出几个不同的阶段。可以观察到散布在钻孔周围的小碎片，其范围取决于激光峰值功率。在空气和氦气环境中，通过飞秒激光脉冲在薄玻璃板上钻出几十微米的孔。使用以 1 kHz 传输 775 nm、150 fs 脉冲的飞秒激光器（Clark-MXR，CPA 2001）在约 150 微米厚的钠钙玻璃板上加工孔。激光脉冲通过平凸透镜在空气或氦气流下聚焦到玻璃板上。照射激光脉冲的数量由电动快门控制。通过激光显微镜和扫描电镜观察钻孔的形状。孔为圆锥形，除了在孔的出口端出现贝壳状裂纹外，孔的侧面无裂纹。前表面的孔径小于表面的激光光斑尺寸，并且在相同的投影条件下随着激光脉冲能量的增加而增大。随着脉冲数的增加，孔的发展显示出几个不同的阶段。观察到散布在钻孔周围的小碎片，其范围取决于激光峰值功率...
Holes of few tens of micrometers have been drilled through a thin glass plate by femtosecond laser pulses in air and helium environment. A femtoseconed laser (Clark-MXR, CPA 2001) which delivered 775 nm, 150 fs pulses at 1 kHz was used to machine holes through soda-lime glass plates of about 150 micrometer thick. Laser pulses were focused by a plano-convex lens on to the glass plate in air or under helium gas flow. Number of irradiating laser pulses was controlled by an electric shutter. The shape of drilled holes was observed by a laser-microscope and a SEM.Holes have conical shapes with crack-free side except shell-like cracks, which appeared at exit end of them. Hole diameters at the front surface are smaller than laser spot size at the surface and increases with laser pulse energy under the same projection conditions. Development of the hole with increasing pulse numbers shows several distinct stages. Small debris scattered around the drilled holes is observed and its range depends on the laser peak power.Holes of few tens of micrometers have been drilled through a thin glass plate by femtosecond laser pulses in air and helium environment. A femtoseconed laser (Clark-MXR, CPA 2001) which delivered 775 nm, 150 fs pulses at 1 kHz was used to machine holes through soda-lime glass plates of about 150 micrometer thick. Laser pulses were focused by a plano-convex lens on to the glass plate in air or under helium gas flow. Number of irradiating laser pulses was controlled by an electric shutter. The shape of drilled holes was observed by a laser-microscope and a SEM.Holes have conical shapes with crack-free side except shell-like cracks, which appeared at exit end of them. Hole diameters at the front surface are smaller than laser spot size at the surface and increases with laser pulse energy under the same projection conditions. Development of the hole with increasing pulse numbers shows several distinct stages. Small debris scattered around the drilled holes is observed and its range depends on the laser peak p...