Optofluidic notch filter integration by lift-off of thin films.
Optofluidic notch filter integration by lift-off of thin films.
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DOI：
10.1364/oe.18.004790
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发表时间：
2010-03-01
期刊：
影响因子：
3.8
通讯作者：
Hawkins AR
中科院分区：
文献类型：
--
作者：
Phillips BS;Measor P;Zhao Y;Schmidt H;Hawkins AR
用于生物分子检测的光流体平台需要光谱滤波来区分分析物信号和不需要的背景。为了实现完全集成的平台，需要片上滤波器。在基于反谐振反射光波导（ARROW）技术的光流体传感器上选择性沉积介电薄膜，为局部片上光学滤波提供了手段。我们提出了一种与薄膜加工兼容的提升技术，包括等离子体增强化学气相和溅射沉积。对于由液芯和固芯波导组成的~1 cm长芯片，所得到的光流体陷波滤波器具有20 dB抑制，线宽低至20 nm。
Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for ~1 cm long chips consisting of liquid-core and solid-core waveguides.