Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes
Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes
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DOI：
10.1063/1.4729942
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发表时间：
2012-06-18
影响因子：
4
通讯作者：
Schroer, C. G.
中科院分区：
文献类型：
--
作者：
Schropp, A.;Hoppe, R.;Schroer, C. G.
We demonstrate x-ray scanning coherent diffraction microscopy (ptychography) with 10 nm spatial resolution, clearly exceeding the resolution limits of conventional hard x-ray microscopy. The spatial resolution in a ptychogram is shown to depend on the shape (structure factor) of a feature and can vary for different features in the object. In addition, the resolution and contrast are shown to increase with increasing coherent fluence. For an optimal ptychographic x-ray microscope, this implies a source with highest possible brilliance and an x-ray optic with a large numerical aperture to generate the optimal probe beam. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4729942]
