Fabrication tolerant polarization splitter and rotator based on a tapered directional coupler
Fabrication tolerant polarization splitter and rotator based on a tapered directional coupler
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基于锥形定向耦合器的制造容差偏振分束器和旋转器
DOI：
10.1364/oe.20.020021
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发表时间：
2012-08-27
期刊：
影响因子：
3.8
通讯作者：
Ou, Haiyan
中科院分区：
文献类型：
--
作者：
Ding, Yunhong;Liu, Liu;Ou, Haiyan
提出了一种基于具有宽松制造公差的锥形定向耦合器的偏振分束器和旋转器（PSR），并在绝缘体上硅平台上进行了演示。该器件的构造简单，只需将窄硅波导与线性锥形较宽波导并联即可。与之前报道的基于法线定向耦合器的PSR相比，其对窄波导宽度的精度要求严格，引入的宽波导锥形结构可以用来补偿窄波导的制造误差。此外，该器件的制造仅需要曝光和蚀刻的单个步骤。实验证明，对于 14 nm 的窄波导宽度偏差以及耦合器长度的大公差，也能实现类似的高转换效率。 (C) 2012年美国光学学会
A polarization splitter and rotator (PSR) based on a tapered directional coupler with relaxed fabrication tolerance is proposed and demonstrated on the silicon-on-insulator platform. The device is simply constructed by parallel-coupling a narrow silicon waveguide with a linearly tapered wider waveguide. Compared to previously reported PSRs based on a normal directional coupler, which suffer from stringent requirements on the accuracy of the narrow waveguide width, the introduced tapered structure of the wide waveguide can be used to compensate the fabrication errors of the narrow waveguide. In addition, only a single step of exposure and etching is needed for the fabrication of the device. Similar high conversion efficiencies are experimentally demonstrated for a narrow waveguide width deviation of 14 nm with large tolerance to the coupler length. (C) 2012 Optical Society of America