Lateral field excited LiTaO3 acoustic wave sensing platform
Lateral field excited LiTaO3 acoustic wave sensing platform
复制标题
横向场激励LiTaO3声波传感平台
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
J. Vetelino
中科院分区：
文献类型：
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作者：
J. McGann;D. McCann;J. Vetelino
切割石英是由于存在温度补偿的纯横切模式（TSM），因此在石英晶体微量平衡（QCM）中使用的标准材料。在QCM中，TSM受到石英晶片顶部和底部表面的电极的激发，从而导致所谓的厚度场激发。当用于传感器应用时，QCM具有多种缺陷。首先，石英是微弱的压电，其次感应表面沉积了金属电极，可以干扰检测目标分析物。另一个常见的压电晶体Litao3提供了一种有趣的选择，因为它具有比石英的压电耦合明显更高，并且有可能实现温度补偿的TSM。此外，通过横向场激发（LFE）可以激发TSM，这使顶表面裸露。本文的目的是从理论上和实验研究使用Litao3作为新的LFE BAW传感器平台的潜力。
AT-cut quartz is the standard material used in the quartz crystal microbalance (QCM) due to the existence of a temperature compensated pure transverse shear mode (TSM). In the QCM the TSM is excited by electrodes on both the top and bottom surfaces of the quartz wafer resulting in what is called thickness field excitation. When used for sensor applications the QCM has several deficiencies. First, quartz is weakly piezoelectric and second the sensing surface has deposited metal electrodes which can interfere with the detection of a target analyte. Another common piezoelectric crystal, LiTaO3, offers an interesting alternative since it has significantly higher piezoelectric coupling than quartz and the possibility of realizing a temperature compensated TSM. Further the TSM can be excited by lateral field excitation (LFE) which leaves the top surface bare. It is the purpose of this paper to theoretically and experimentally investigate the potential of using LiTaO3 as a new LFE BAW sensor platform.