Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining
Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining
复制标题
新型末端飞切伺服金刚石加工大规模制造微透镜阵列
DOI：
10.1364/oe.23.020593
复制
发表时间：
2015-08-10
期刊：
影响因子：
3.8
通讯作者：
Zhang, Shaojian
中科院分区：
文献类型：
--
作者：
Zhu, Zhiwei;To, Suet;Zhang, Shaojian
快速/慢速刀具伺服(FTS/STS)金刚石车削是一种非常有前途的微透镜阵列(MLA)生成技术。然而，由于该技术固有的局限性，大规模处理MLA仍然是一个挑战。本文采用了一种新型的超精密金刚石切割方法--端部飞切伺服系统(EFCS)，并对其进行了研究，以实现MLA的大规模生成。在详细讨论了加工MLA的特点优势后，考虑到金刚石刀具的几何和安装姿态，提出了适合于EFCS的最优刀具轨迹生成策略。实验制作了一个典型的大面积非球面MLA，并对其成形精度、表面微观形貌和加工效率进行了详细的研究。结果表明，得到了全区质量均一的MLA。此外，还可以同时实现高加工效率、极小的刀具轨迹控制点体积和整个切割过程中机床系统动力学的最佳利用。(C)2015年美国光学学会
Fast/slow tool servo (FTS/STS) diamond turning is a very promising technique for the generation of micro-lens array (MLA). However, it is still a challenge to process MLA in large scale due to certain inherent limitations of this technique. In the present study, a novel ultra-precision diamond cutting method, as the end-fly-cutting-servo (EFCS) system, is adopted and investigated for large-scale generation of MLA. After a detailed discussion of the characteristic advantages for processing MLA, the optimal toolpath generation strategy for the EFCS is developed with consideration of the geometry and installation pose of the diamond tool. A typical aspheric MLA over a large area is experimentally fabricated, and the resulting form accuracy, surface micro-topography and machining efficiency are critically investigated. The result indicates that the MLA with homogeneous quality over the whole area is obtained. Besides, high machining efficiency, extremely small volume of control points for the toolpath, and optimal usage of system dynamics of the machine tool during the whole cutting can be simultaneously achieved. (C) 2015 Optical Society of America