Metal-Transfer-Micromolded Three-Dimensional Microelectrode Arrays for in-vitro Brain-Slice Recordings
Metal-Transfer-Micromolded Three-Dimensional Microelectrode Arrays for in-vitro Brain-Slice Recordings
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DOI：
10.1109/jmems.2011.2105253
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发表时间：
2011-04-01
影响因子：
2.7
通讯作者：
Allen, Mark G.
中科院分区：
文献类型：
--
作者：
Rajaraman, Swaminathan;Choi, Seong-O;Allen, Mark G.
我们报道了金属转移微模塑3-D微电极阵列(3-D MEA)的发展，并用这些MEA成功地对大鼠海马脑片进行了电特性、生物兼容性测量和电生理记录。金属转移微模塑是一种用于在聚合物基板上制造MEAs等非平面金属化图案化微电子机械系统器件的制造技术。这项技术提供了一种自对准金属化方案，无需复杂的3-D光刻。对于自对准金属化方案，展示了两种技术，即有意形成的非平面模具和荫罩。MEA还进一步使用定制设计的商业印刷电路板进行包装，并使用对二甲苯沉积进行绝缘。使用两种技术确定了记录位置：激光微细加工/反应离子刻蚀(RIE)对二甲苯和使用“封顶”技术选择性沉积对二甲苯。本文成功地展示了MEAs的电学(阻抗谱)、生物相容性(神经元的二维平面培养)、电生理学(组织切片记录)的特性。基于经典等效电路建立了电极阻抗模型，研究了高频阻抗估计技术。我们相信，这种制造方法提供了一条有吸引力的途径，可用于神经生理学和药理学领域的一次性和生物相容的3-D MEAs。[2010-0254]
We report the development of metal-transfer-micromolded 3-D microelectrode arrays (3-D MEAs) and demonstrate successful electrical characterization, biocompatibility measurements, and electrophysiological recordings from rat hippocampal brain slices with these MEAs. Metal transfer micromolding is introduced as a manufacturing technology for producing nonplanar metallized patterned microelectromechanical-systems devices such as MEAs on polymeric substrates. This technology provides a self-aligned metallization scheme that eliminates the need for complex 3-D lithography. Two techniques, i.e., an intentionally formed nonplanar mold and a shadow mask, are demonstrated for the self-aligned metallization scheme. The MEAs have further been packaged using custom-designed commercial printed circuit boards and insulated using parylene deposition. Recording sites have been defined using two techniques: laser micromachining/reactive ion etching (RIE) of parylene and selective deposition of parylene using a "capping" technique. Electrical (impedance spectroscopy), biocompatibility (2-D planar cultures of neurons), electrophysiological (tissue slice recordings) characterizations of the MEAs are successfully demonstrated in this paper. The impedance of the electrodes was modeled based on a classical equivalent circuit, and high-frequency impedance estimation techniques were studied. We believe this fabrication approach offers an attractive route to disposable and biocompatible 3-D MEAs, utilizable by the neurophysiology and pharmacology communities. [2010-0254]