Hollow waveguides with low intrinsic photoluminescence fabricated with Ta2O5 and SiO2 films
Hollow waveguides with low intrinsic photoluminescence fabricated with Ta2O5 and SiO2 films
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DOI：
10.1063/1.3561749
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发表时间：
2011-02-28
影响因子：
4
通讯作者：
Hawkins, A. R.
中科院分区：
文献类型：
--
作者：
Zhao, Y.;Jenkins, M.;Hawkins, A. R.
利用Ta 2 O 5和SiO2薄膜制备了一种低本征光致发光的集成空芯光波导。用等离子体增强化学气相沉积SiO2和溅射Ta 2 O 5的组合制成的空芯波导提供了用于光流体生物荧光测量的几乎最佳的结构，具有低光学损耗、高制造产率和低背景光致发光。与使用Si 3 N4制成的早期结构相比，Ta 2 O 5基空芯波导的光致发光背景降低了10倍，荧光纳米珠检测的信噪比提高了12倍。(C)2011年美国物理学会。[doi：10.1063/1.3561749]
A type of integrated hollow core waveguide with low intrinsic photoluminescence fabricated with Ta2O5 and SiO2 films is demonstrated. Hollow core waveguides made with a combination of plasma-enhanced chemical vapor deposition SiO2 and sputtered Ta2O5 provide a nearly optimal structure for optofluidic biofluorescence measurements with low optical loss, high fabrication yield, and low background photoluminescence. Compared to earlier structures made using Si3N4, the photoluminescence background of Ta2O5 based hollow core waveguides is decreased by a factor of 10 and the signal-to-noise ratio for fluorescent nanobead detection is improved by a factor of 12. (C) 2011 American Institute of Physics. [doi:10.1063/1.3561749]