Effects of post-annealing on the dielectric properties of Au/BaTiO3/Pt thin film capacitors
Effects of post-annealing on the dielectric properties of Au/BaTiO3/Pt thin film capacitors
复制标题
后退火对Au/BaTiO3/Pt薄膜电容器介电性能的影响
DOI：
10.1016/j.matlet.2003.10.047
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发表时间：
2004
影响因子：
3
通讯作者：
J. Varela
中科院分区：
文献类型：
--
作者：
Ejh Lee;F. Pontes;E. Leite;E. Longo;R. Magnani;P. S. Pizani;J. Varela
采用聚合物前驱体法在Pt/Ti/SiO2/Si衬底上制备了钛酸钡薄膜。采用X射线衍射（XRD）、扫描电子显微镜（SEM）、原子力显微镜（AFM）、傅里叶变换红外光谱（FT-IR）和显微拉曼光谱（Raman）等测试手段研究了BaTiO 3钙钛矿相的形成过程。之后，将膜在氧气和氮气气氛中在300 °C下进行后退火处理2小时，并测量其介电性质。据观察，薄膜的电性能是非常敏感的退火后的气氛的性质。这项研究表明，后退火在氧气气氛中增加的介电弛豫现象，后退火在氮气气氛中产生轻微的介电弛豫。
Barium titanate thin films were prepared by the polymeric precursor method and deposited onto Pt/Ti/SiO2/Si substrates. X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM), Fourier transform infrared spectroscopy (FT-IR) and micro-Raman spectroscopy were used to investigate the formation of the BaTiO3perovskite phase. Afterwards, the films were submitted to post-annealing treatments in oxygen and nitrogen atmospheres at 300 °C for 2 h, and had their dielectric properties measured. It was observed that the electric properties of the thin films are very sensitive to the nature of the post-annealing atmosphere. This study demonstrates that post-annealing in an oxygen atmosphere increases the dielectric relaxation phenomenon and that post-annealing in a nitrogen atmosphere produces a slight dielectric relaxation.