Thin carbon films as electrodes for bioelectronic applications
Thin carbon films as electrodes for bioelectronic applications
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碳薄膜作为生物电子应用的电极
DOI：
10.1016/s0956-5663(98)00057-8
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发表时间：
1998
影响因子：
12.6
通讯作者：
H. Ryssel
中科院分区：
文献类型：
--
作者：
R. Schnupp;R. Kühnhold;G. Temmel;E. Burte;H. Ryssel
采用射频磁控溅射法在硅、氧化硅和铂衬底上制备了类金刚石薄膜电极。物理和电化学性能的工艺参数，如温度，压力和入射功率的依赖关系进行了研究。我们沉积了氢浓度低于1%的碳层。因此，电阻率被最小化到30 m Ωcm的值。所有DLC膜的低表面粗糙度导致小的双电层容量为37μF/cm 2。一个大的电化学带宽和一个接近理想的可逆性，并与传统的玻碳电极的性能相比。证明了DLC电极在电化学研究和生物电子应用中的适用性。
Thin film diamond-like carbon (DLC) electrodes were fabricated by radio frequency (RF) magnetron sputtering on silicon, silicon oxide, and platinum substrates. The dependence of physical and electrochemical properties on process parameters like temperature, pressure, and incident power was investigated. We deposited carbon layers with hydrogen concentrations below 1%. Therefore, the resistivity was minimized to a value of 30mΩcm. The low surface roughness of all DLC films leaded to a small double-layer capacity of 37μF/cm2. A large electrochemical bandwidth and a nearly ideal reversibility was shown and compared to the properties of conventional glassy carbon electrodes. The applicability of the DLC electrodes to electrochemical investigations and bioelectronic applications was demonstrated.