Growth and characterization of p-type oxide semiconductor thin films by using mist CVD method.
Growth and characterization of p-type oxide semiconductor thin films by using mist CVD method.
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雾气CVD法p型氧化物半导体薄膜的生长与表征
DOI:
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发表时间:
2019
期刊:
影响因子:
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通讯作者:
and Tetsuji Hirato
中科院分区:
文献类型:
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作者:
Takumi Ikenoue;Toshikazu Kawai;Ryo Wakashima;Junki Inoue;Satoshi Yoneya;Masao Miyake;and Tetsuji Hirato