Outgassing Properties of Chemically Polished Stainless Steels
Outgassing Properties of Chemically Polished Stainless Steels
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化学抛光不锈钢的除气性能
DOI：
10.3131/jvsj.41.96
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发表时间：
1998
期刊：
影响因子：
--
通讯作者：
M. Kanazawa
中科院分区：
文献类型：
--
作者：
S. Inayoshi;Kazuya Saito;Yukie Sato;S. Tsukahara;Y. Hara;S. Amano;K. Ishizawa;T. Nomura;A. Simada;M. Kanazawa
采用化学抛光（CP）技术对SUS 304 L不锈钢进行表面处理，从除气率和重复性两个方面对抛光液和抛光条件进行了优化。利用俄歇电子能谱（AES）、扫描电子显微镜（SEM）和原子力显微镜（AFM）对抛光后的表面进行了表征，并与传统电解抛光（EP）和玻璃微珠喷砂（GBB）处理后的表面进行了比较。在抽气曲线上，CP样品的放气速率与EP样品和GBB样品的放气速率相同，为10%。经150°C × 20 h烘烤后，在28°C的极限压力下，三种不同表面处理的真空室的出气率均为1 × 10-9 Pa·m·s-1。该结果满足了将阴极保护用于超高真空材料表面处理的技术要求，且阴极保护不需要电能，成本低于电真空处理。
Chemical polishing (CP) was selected to develop a practical surface treatment of stainless steel that will be generally used in ultrahigh vacuum (UHV) technology because CP can treat materials wholly in any shape at the final step of parts fabrication process.Using short samples of SUS304L stainless steel the solution and the polishing condition were optimized from outgassing rate and reproducibility. The polished surfaces were characterized by Auger electron spectroscopy (AES), scanning electron microscopy (SEM), and Atomic force microscopy (AFM).The chemically polished (CP) chamber was compared with those treated by conventional electrolytic polishing (EP) and glass beads blasting (GBB). In pump-down curves, the outgassing rate of CP samples was the same as that of EP one and 10% of GBB one. At the ultimate pressure at 28°C after 150°C × 20 h baking the outgassing rate of the three chambers with different surface treatments showed a same value, 1 × 10-9 Pa·m·s-1.The technical purpose to use the CP for UHV material surface treatment is satisfied by this result and the cost of CP is less than that of EP because it doesn't need electricity.