Propagation properties of leaky surface acoustic wave on water-loaded LiTaO3/quartz bonded structure
Propagation properties of leaky surface acoustic wave on water-loaded LiTaO3/quartz bonded structure
复制标题
含水LiTaO3/石英粘结结构上泄漏表面声波的传播特性
DOI：
10.35848/1347-4065/ab85ac
复制
发表时间：
2020
影响因子：
1.5
通讯作者：
J. Mizuno
中科院分区：
文献类型：
--
作者：
S. Kakio;Yoshiki Kato;R. Suenaga;Masashi Suzuki;Ami Tezuka;H. Kuwae;Hiroaki Yokota;T. Yonai;Kazuhito Kishida;J. Mizuno
近来，作为获得高性能表面声波（SAW）器件的手段，诸如LiTaO 3/石英结构的接合结构已经引起关注。为了研究通过从测量的归一化衰减系数中减去计算的进入水中的泄漏损失来评估这种粘接结构中的声损失的可能性，利用线聚焦激光器研究了36° YX-LiTaO 3/AT 0 ° X石英键合结构上泄漏声表面波的传播特性，如速度和归一化衰减因子。束超声材料表征系统，并被发现是在良好的协议与0°X和90°X传播方向的计算值。
Recently, bonded structures such as LiTaO3/quartz structures have been attracting attention as a means of obtaining high-performance surface acoustic wave (SAW) devices. To investigate the possibility of evaluating the acoustical loss in such bonded structures by subtracting the calculated leakage loss into the water from the measured normalized attenuation factor, propagation properties such as the velocity and normalized attenuation factor of leaky SAWs on a water-loaded 36°YX-LiTaO3/AT0°X-quartz bonded structure were investigated using a line-focus-beam ultrasonic material characterization system and were found to be in good agreement with the calculated values for both the 0°X and 90°X propagation directions.