Atomic layer deposited borosilicate glass microchannel plates for large area event counting detectors
Atomic layer deposited borosilicate glass microchannel plates for large area event counting detectors
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DOI：
10.1016/j.nima.2011.11.022
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发表时间：
2012-12-11
影响因子：
1.4
通讯作者：
Mane, A.
中科院分区：
文献类型：
--
作者：
Siegmund, O. H. W.;McPhate, J. B.;Mane, A.
通过原子层沉积，在具有 20 μm 和 40 μM 孔的硼硅酸盐玻璃微毛细管阵列基板上沉积电阻层和二次电子发射层，以生产功能性微通道板。 32.7 毫米和 20 厘米见方的器件格式已在模拟和光子计数模式下制造和测试。测试显示，放大、成像、背景率、脉冲形状和寿命特性与标准玻璃微通道板相当。这种类型的大面积微通道板有助于构建带有带状线读数的 20 厘米密封管传感器，这些传感器正在为切伦科夫光检测而开发。互补工作已在硼硅酸盐玻璃上制成了峰值量子效率为 25% 的 Na2KSb 双碱光电阴极。此外，已经在硼硅酸盐微通道板上成功制造了 GaN (Mg) 不透明光电阴极。 (C) 2011 Elsevier B.V. 保留所有权利。
Borosilicate glass micro-capillary array substrates with 20 mu m and 40 mu M pores have been deposited with resistive, and secondary electron emissive, layers by atomic layer deposition to produce functional microchannel plates. Device formats of 32.7 mm and 20 cm square have been fabricated and tested in analog and photon counting modes. The tests show amplification, imaging, background rate, pulse shape and lifetime characteristics that are comparable to standard glass microchannel plates. Large area microchannel plates of this type facilitate the construction of 20 cm format sealed tube sensors with strip-line readouts that are being developed for Cherenkov light detection. Complementary work has resulted in Na2KSb bialkali photocathodes with peak quantum efficiency of 25% being made on borosilicate glass. Additionally GaN (Mg) opaque photocathodes have been successfully made on borosilicate microchannel plates. (C) 2011 Elsevier B.V. All rights reserved.