Fabrication of varying-length micro Si probe arrays for neural activity recording by vapor-liquid-solid growth method

Fabrication of varying-length micro Si probe arrays for neural activity recording by vapor-liquid-solid growth method
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气液固生长法制备用于神经活动记录的不同长度微硅探针阵列

DOI:
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发表时间:
2003
期刊:
The Japan Society of Applied Physics (The 50th Spring meeting) No.3
影响因子:
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通讯作者:
Makoto Ishida
Makoto Ishida
中科院分区:
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文献类型:
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作者:
Ryoji Tani;Takeshi Kawano;Hiroshi Ishino;Hidekuni Takao;Kazuaki Sawada;Makoto Ishida

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