Spatial resolution in transmission electron microscopy
Spatial resolution in transmission electron microscopy
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DOI：
10.1016/j.micron.2022.103304
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发表时间：
2022-06-12
期刊：
影响因子：
2.4
通讯作者：
Watanabe, M.
中科院分区：
文献类型：
--
作者：
Egerton, R. F.;Watanabe, M.
我们回顾了决定透射电子显微镜（TEM）和扫描透射电子显微镜（STEM）的空间分辨率的实际因素，然后列举了用点扩散函数表示分辨率的优点。PSF给出的主要分辨率限制因素：孔径衍射，球面和色差，光束发散，光束展宽，库仑离域，辐解损伤和二次电子产生的吸附原子或原子在矩阵中。我们注意到各种定义的光束展宽，复杂的描述这种效果在非常薄的标本，和厚样品的亮场STEM的分辨率优化的方法。通过模拟比较了非晶和晶体材料中的光束扩展。对于束敏感的标本，我们强调剂量限制分辨率（DLR）的重要性，并简要地认识到努力克服的波和粒子性质的电子设置的基本分辨率限制。
We review the practical factors that determine the spatial resolution of transmission electron microscopy (TEM) and scanning-transmission electron microscopy (STEM), then enumerate the advantages of representing resolution in terms of a point-spread function. PSFs are given for the major resolution-limiting factors: aperture diffraction, spherical and chromatic aberration, beam divergence, beam broadening, Coulomb delocalization, radiolysis damage and secondary-electron generation from adatoms or atoms in a matrix. We note various definitions of beam broadening, complications of describing this effect in very thin specimens, and ways of optimizing the resolution in bright-field STEM of thick samples. Beam spreading in amorphous and crystalline materials is compared by means of simulations. For beam-sensitive specimens, we emphasize the importance of dose-limited resolution (DLR) and briefly recognize efforts to overcome the fundamental resolution limits set by the wave and particle properties of electrons.