Mechanically corner-coupled square microresonator array for reduced series motional resistance
Mechanically corner-coupled square microresonator array for reduced series motional resistance
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DOI：
10.1109/jmems.2006.883588
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发表时间：
2006-12-01
影响因子：
2.7
通讯作者：
Nguyen, Clark T. -C.
中科院分区：
文献类型：
--
作者：
Demirci, Mustafa U.;Nguyen, Clark T. -C.
通过机械耦合和激励平行阵列的角耦合多晶硅方板谐振器，实现了振动微机械谐振器串联运动阻力R-x的大幅度降低。使用这一技术，在70 MHz频率下，获得了480欧米伽的有效R-x，比一个单独的横模角支撑正方形谐振器所表现出的2.82k欧米伽小了5.9倍以上，所有这些都实现了，同时仍然保持了有效的Q&gT；9000。这种降低R-x的方法优于基于电极到谐振器间隙的强力缩放或DC偏置增加的方法，因为它允许在不牺牲线性度的情况下减小R-x，从而打破了缩放时经常出现的R-x与动态范围之间的权衡。文中还比较了横模方形微机械谐振器的两种锚固方案，并模拟了支撑梁参数对谐振频率的影响。
Substantial reductions in vibrating micromechanical resonator series motional resistance R-x have been attained by mechanically coupling and exciting a parallel array of corner-coupled polysilicon square plate resonators. Using this technique with seven resonators, an effective R-x of 480 Omega has been attained at 70 MHz, which is more than 5.9X smaller than the 2.82 k Omega exhibited by a stand-alone transverse-mode corner-supported square resonator, and all this achieved while still maintaining an effective Q > 9000. This method for R-x-reduction is superior to methods based on brute force scaling of electrode-to-resonator gaps or dc-bias increases, because it allows a reduction in R-x without sacrificing linearity, and thereby breaks the R-x versus dynamic range tradeoff often seen when scaling. This paper also compares two types of anchoring schemes for transverse-mode square micromechanical resonators and models the effect of support beam parameters on resonance frequency.