MEMS absolute pressure sensor on a flexible substrate
MEMS absolute pressure sensor on a flexible substrate
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柔性基板上的 MEMS 绝对压力传感器
DOI：
10.1109/memsys.2012.6170240
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
Z. Çelik
中科院分区：
文献类型：
--
作者：
M. Ahmed;D. Butler;Z. Çelik
本文描述了夹在柔性聚酰亚胺之间的微机械压阻绝对压力传感器的制造和表征。这些传感器专为航空航天应用中的结构健康监测而设计。采用悬浮式氧化铝隔膜，其中镍铬合金 (Ni-80%/Cr-20%) 压阻传感器放置在半惠斯通电桥几何形状中，以确保线性响应和热稳定性。灵敏度为 1.51 nV/Pa，平均动态范围为 8.31 MPa。
This paper describes the fabrication and characterization of micromachined, piezoresistive, absolute pressure sensors sandwiched between a flexible polyimide. The sensors are designed for structural health monitoring in aerospace applications. A suspended aluminum oxide diaphragm is utilized where nichrome (Ni-80%/Cr-20%) piezoresistive sensors are placed in a half Wheatstone bridge geometry to ensure a linear response and thermal stability. The sensitivity was found to be 1.51 nV/Pa with an average dynamic range of 8.31 MPa.