Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication
Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication
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DOI：
10.1023/a:1012469017354
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发表时间：
2001-12-01
影响因子：
2.8
通讯作者：
Yu, Liyong
中科院分区：
文献类型：
--
作者：
Lee, L. James;Madou, Marc J.;Yu, Liyong
本文提出了几种基于聚合物的 CD 微流控平台的微加工方法。原型制作同时使用了传统的数控加工和光刻技术。对于批量生产，模具镶件是通过工具钢 CNC 加工和类似 LIGA 的工艺制成的，例如 UV 光刻、光刻/电镀和光刻/深反应离子蚀刻 (DRIE)。尝试了几种成型方法，包括液体树脂铸造、薄壁注射成型和热压花。解释了每种方法的优点和缺点。还简要讨论了微流体平台的塑料粘合。
Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.