Application of Micromachining Technology in Micro-sensors

Application of Micromachining Technology in Micro-sensors
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DOI：
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发表时间：
2002
期刊：
Piezoelectrics and Acoustooptics
影响因子：
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通讯作者：
Ma Jia
Ma Jia
中科院分区：
其他
文献类型：
--
作者：
Ma Jia

文献摘要

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With the wide application of micro sensors,micromachining technology is more and more used in manufacture for micro sensors.The key processes of bulk micromachining and surface micromachining are introduced,and two micro sensors using the above technologies are presented respectively.