A macromodel for squeeze-film air damping in the free-molecule regime
A macromodel for squeeze-film air damping in the free-molecule regime
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DOI：
10.1063/1.3275844
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发表时间：
2010-01-01
影响因子：
4.6
通讯作者：
Ye, Wenjing
中科院分区：
文献类型：
--
作者：
Hong, Gang;Ye, Wenjing
提出了一种三维蒙特卡罗（MC）模拟方法，用于精确预测自由分子气体状态下微谐振器的压膜空气阻尼。基于MC模拟和分析的旅行时间分布，一个宏模型，直接与设备的尺寸和操作参数的空气阻尼，构建。该模型为高性能微谐振器的设计提供了一个有效的工具。通过对几种微谐振器品质因数的建模，验证了宏模型的准确性。结果表明，两种谐振腔的品质因数与实验值的相对误差分别为3.9%和5.7%。另一方面，在所有考虑的情况下，宏模型结果和MC模拟结果之间的协议是优秀的。
A three-dimensional Monte Carlo (MC) simulation approach is developed for the accurate prediction of the squeeze-film air damping on microresonators in the free-molecule gas regime. Based on the MC simulations and the analytical traveling-time distribution, a macromodel, which relates air damping directly with device dimensions and operation parameters, is constructed. This model provides an efficient tool for the design of high-performance microresonators. The accuracy of the macromodel is validated through the modeling of the quality factors of several microresonators. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9% and 5.7%, respectively. The agreements between the macromodel results and MC simulation results, on the other hand, are excellent in all cases considered.