The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses
The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses
复制标题
等离子体激元和波导模式在超短激光脉冲半导体表面改性中的作用
DOI：
10.1117/12.786844
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
P. Kashkarov
中科院分区：
文献类型：
--
作者：
G. A. Martsinovsky;G. Shandybina;D. Smirnov;S. Zabotnov;L. Golovan;V. Timoshenko;P. Kashkarov
在飞秒激光辐照下，硅表面形成了偏振相关的波纹。所提出的理论模型描述了非平衡电子-空穴等离子体的产生引起半导体表面光学响应的变化，并解释了飞秒激光脉冲作用下表面极化子和波导模激发的机制。
Polarization-dependent ripples were formed at silicon surfaces under femtosecond laser irradiation. Proposed theoretical model describes changes in optical response of semiconductor surface, induced by generation of nonequilibrium electron-hole plasma, and explains mechanism of surface polaritons and waveguide modes exciatation during femtosecond laser pulse action.