Focused ion beam milling: A method of site-specific sample extraction for microanalysis of Earth and planetary materials
Focused ion beam milling: A method of site-specific sample extraction for microanalysis of Earth and planetary materials
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聚焦离子束铣削：一种用于地球和行星材料微量分析的特定位点样品提取方法
DOI：
10.2138/am-2001-8-917
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发表时间：
2001
影响因子：
3.1
通讯作者：
K. Livi
中科院分区：
文献类型：
--
作者：
P. Heaney;E. Vicenzi;L. Giannuzzi;K. Livi
摘要Ar离子研磨是将矿物切片细化为电子透明以进行透射电子显微镜分析的常规方法，但该技术存在明显的缺点。特别是，在样品研磨过程中对亚微米级夹杂物的选择性减薄和成像是非常有问题的。我们利用聚焦离子束(FIB)提拉技术获得了成功的结果，该技术利用30kVGa+离子束以纳米级的精度提取电子透明样品。利用这个程序，我们已经准备了一些地球材料，它们代表了一系列的结构和成分，用于透射电子显微镜分析。我们相信，FIB研磨将在地球和行星材料微量分析领域创造新的重大机遇，特别是在超贵重矿物和岩石样品方面。
Abstract Argon ion milling is the conventional means by which mineral sections are thinned to electron transparency for transmission electron microscope (TEM) analysis, but this technique exhibits significant shortcomings. In particular, selective thinning and imaging of submicrometer inclusions during sample milling are highly problematic. We have achieved successful results using the focused ion beam (FIB) lift-out technique, which utilizes a 30 kV Ga+ ion beam to extract electron transparent specimens with nanometer scale precision. Using this procedure, we have prepared a number of Earth materials representing a range of structures and compositions for TEM analysis. We believe that FIB milling will create major new opportunities in the field of Earth and planetary materials microanalysis, particularly with respect to ultraprecious mineral and rock samples.